TE Connectivity / Measurement Specialties 85UHP Pressure Sensors
TE Connectivity's (TE) Measurement Specialties 85UHP Pressure Sensors offer a MEMS piezo-resistive chip incorporated in a 316L stainless steel or alloy C276 module with silicone oil filled, which transfers pressure from a thin corrugated diaphragm in the front face. The media-compatible, weldable compact profile was designed and manufactured for OEM for a semiconductor application process duration that is greater than the TE standard 85 ISO capsule.
TE Connectivity's (TE) Measurement Specialties 85UHP Pressure Sensors supply wetted material options and surface roughness optimized for ultra-high purity and ultra-high vacuum scenarios. The devices harness TE's advanced MEMS capabilities to deliver unparalleled precision and stability.
Features
- Hi-vacuum stability
- F105 compliant wetted surfaces (alloy C276 variants)
- -40°C to +125°C operating temperature
- Up to ±0.1% pressure non-linearity
- Solid state reliability
Applications
- Gas cabinets
- Mass flow controller
- High-purity gas delivery system
- Pressure and flow control in
- Semiconductor process
Specifications
- C276 or 316L SS wetted surface material - optional
- Compensated or uncompensated - optional
- High vacuum stability at 10-3Pa
- 0.1% span/year long-term stability
- Absolute pressure measurement
- 13mm diaphragm diameter
DIMENSIONS - Uncompensated
DIMENSIONS- Constant Current Compensated
DIMENSIONS - Constant Voltage Compensated
Publicado: 2025-09-19
| Actualizado: 2025-11-12